Along with a design that reduces pressure loss, it also excels in characteristics required for gas filters, such as filtration properties and gas replacement properties! High-purity alumina is used.
The element used in the inline gas filter "CEPURE" by CoorsTek is made of over 99.9% high-purity alumina with excellent corrosion resistance, featuring uniformly controlled fine pores that consist of two or three layers. Along with a design that geometrically reduces pressure loss, it also excels in filtration characteristics and gas replacement properties, making it an ideal filter media.
【Features】
- Excellent gas replacement properties
- High corrosion resistance
【Specifications】
Material: Alumina porous body (element part) / SUS / Nickel / PTFE
【Applications】
Inline gas filters for various semiconductor processes
*For more details, please contact us.